- Line-up (6″–35″) available for semi-conductor and display industries
- 35” version available for space and large equipment
Features
1. Provides a clean vacuum
- Absorbs and removes various gas without using oil
2. Easy regeneration
- Quick, convenient regenation possible with Auto Regeneration
3. System optimized to customer conditions
- Various vacuum simulations provided as part of technical consulting
4. Compact size, simple configuration
- Characterized by lightweight and compactness. Able to fit size requirements of customers
5. Economic maintenance costs
- Streamlined service with low maintenance costs such as reduced power costs